VLSI Research Inc.

Intel made quite a splash with its announcement that it had developed computational lithography. In this video, Yan Borodovsky, describes how it is done, what the reticles are like, the benefits to cost and design efficiency, and the decision-making process that led up to moving in this direction, rather than down the more conventional immersion lithography path. Yan Borodovsky is a Senior Intel Fellow and is Director of Advanced Lithography there.

About Presentation by Yan Borodovsky


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