This is the year of
immersion. It's moved to manufacturing and EUV seems closer than ever
before. Find out the latest trends in lithography for semiconductor
manufacturing of future technology for tomorrow's nanochips, which are
plunging to dimensions of 32nm and below. It covers high-refractive
index materials, inverse lithography, double patterning, imprint
lithography, and more. Hear the world's top experts from the leading
scanner manufacturers debate what's hot and what's not . . .