VLSI Research Inc.

This interview with Kazuo Ushida – Director, Member of the Board & Senior Executive Officer of Nikon and President of its Precision Equipment Company – covers a wide range of topics. This includes how and why they are winning orders in immersion lithography with the S610C; design concepts behind their new ultra-productivity tools; how Skyhook vibration isolation technology works; progress in EUV; lens polishing, flare, performance and more. Find out why if an EUV lens was as big as the world, its biggest mountain could only be 2mm high.

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